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1. |  | Title: Gas-Phase and Surface Chemistry in Electronic Materials Processing: Symposium Held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. (Mate) by T.J. Mountziaris, G.R. Paz-Pujalt, F.T.J. Smith ISBN: 1558992332 Publisher: Material Research Society Pub. Date: May, 1994 List Price: $74.00 Amazon.com Price: $74.00 |
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