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Gas-Phase and Surface Chemistry in Electronic Materials Processing: Symposium Held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. (Mate)

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Title: Gas-Phase and Surface Chemistry in Electronic Materials Processing: Symposium Held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. (Mate)
by T.J. Mountziaris, G.R. Paz-Pujalt, F.T.J. Smith
ISBN: 1-55899-233-2
Publisher: Material Research Society
Pub. Date: May, 1994
Format: Hardcover
List Price(USD): $74.00
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