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1. |  | Title: Characterization and Metrology for Ulsi Technology 2003: International Conference on Characterization and Metrology for Ulsi Technology, Austin, Texas 24-28 March 2003 by David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, Robert McDonald, Stefan Zollner, Rajinder P. Khosla, Eric M. Secula ISBN: 0735401527 Publisher: AIP Press Pub. Date: 01 November, 2003 List Price: $210.00 Amazon.com Price: $210.00 |
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