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Characterization and Metrology for Ulsi Technology 2003: International Conference on Characterization and Metrology for Ulsi Technology, Austin, Texas 24-28 March 2003 (AIP CONFERENCE PROCEEDINGS)

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Title: Characterization and Metrology for Ulsi Technology 2003: International Conference on Characterization and Metrology for Ulsi Technology, Austin, Texas 24-28 March 2003 (AIP CONFERENCE PROCEEDINGS)
by David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, Robert McDonald, Stefan Zollner, Rajinder P. Khosla, Eric M. Secula
ISBN: 0-7354-0152-7
Publisher: Amer Inst of Physics
Pub. Date: November, 2003
Format: Hardcover
Volumes: 1
List Price(USD): $210.00
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