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1. |  | Title: Materials Science of Microelectromechanical Systems (Mems) Devices II: Symposium Held November 29-December 1, 1999, Boston, Massachusetts, U.S.A by Maarten P. De Boer, Arthur H. Heuer, S. Joshua Jacobs, Eric Peeters ISBN: 1558995137 Publisher: Material Research Society Pub. Date: September, 2000 List Price: $90.00 Amazon.com Price: $90.00 |
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