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1. |  | Title: Materials Science of Microelectromechanical Systems (Mems) Devices: Symposium Held December 1-2, 1998, Boston, Massachusetts, U.S.A/ (Materials Research Society Symposia Proceedings, . 546.) by Arthur H. Heuer, S.J. Jacobs ISBN: 1558994521 Publisher: Material Research Society Pub. Date: February, 2000 List Price: $90.00 Amazon.com Price: $90.00 |
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