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Materials Science of Microelectromechanical Systems (Mems) Devices: Symposium Held December 1-2, 1998, Boston, Massachusetts, U.S.A/ (Materials Research Society Symposia Proceedings, . 546.)

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Title: Materials Science of Microelectromechanical Systems (Mems) Devices: Symposium Held December 1-2, 1998, Boston, Massachusetts, U.S.A/ (Materials Research Society Symposia Proceedings, . 546.)
by Arthur H. Heuer, S.J. Jacobs
ISBN: 1-55899-452-1
Publisher: Material Research Society
Pub. Date: February, 2000
Format: Hardcover
Volumes: 1
List Price(USD): $90.00
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