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Cover ImageTitle: Chemical Mechanical Polishing /Fundamentals and Challenges: Symposium Held April 5-7, 1999, San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 566.)
by S. V. Babu, S. Danyluk, M.I. Krishnan, M. Tsujimura
ISBN: 1558994734
Publisher: Material Research Society
Pub. Date: February, 2000
List Price: $70.00
Amazon.com Price: $70.00

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