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1. |  | Title: Micromachining & Microfabrication Process Technology III: 29-30 September 1997 Austin, Texas by Shih-Chia Chang, Stella W. Pang ISBN: 0819426555 Publisher: SPIE--The International Society for Optical Engineering Pub. Date: September, 1997 List Price: $80.00 Amazon.com Price: $80.00 |
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