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Characterization and Metrology for Ulsi Technology: 2000 International Conference (Aip Conference Proceedings, 550)

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Title: Characterization and Metrology for Ulsi Technology: 2000 International Conference (Aip Conference Proceedings, 550)
by David G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, E.M. Secula, International Conference on Characterization and Metrology for Ulsi Te
ISBN: 1-56396-967-X
Publisher: Amer Inst of Physics
Pub. Date: March, 2001
Format: Hardcover
Volumes: 1
List Price(USD): $185.00
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