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Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions III: Physics and Technology of Dopant-Defect Interactions III : Symposi ... ociety Symposium Proceedings Series Vol. 669)

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Title: Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions III: Physics and Technology of Dopant-Defect Interactions III : Symposi ... ociety Symposium Proceedings Series Vol. 669)
by Erin C. Jones, P. A. Stolk, K. S. Jones, J. Matsuo, M. D. Giles
ISBN: 1-55899-605-2
Publisher: Materials Research Society
Pub. Date: 01 October, 2001
Format: Hardcover
List Price(USD): $79.00
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