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Title: Silicon Processing for the VLSI Era, Vol. 1: Process Technology by Stanley Wolf, Richard N. Tauber ISBN: 0-9616721-6-1 Publisher: Lattice Press Pub. Date: 01 November, 1999 Format: Hardcover Volumes: 1 List Price(USD): $229.95 |
Average Customer Rating: 4.33 (3 reviews)
Rating: 3
Summary: Just overview
Comment: I don't like this series. Vol 1, 2 were used when I was in University
The series just gave you overview. It won't explain in details. You have to research on your own. Since silicon processing changes in very fast pace, these books may already be out of date (almost 4 years ago). But it is still good reference.
Basically, this book is just collection of the technical papers. I can find some articles are almost 'word by word' copied from the reference Journals and technical papers.
Neverless, it still saves a lot of time to go to the library and get the journals (This may be the only good things I can find. THe journals are not cheap. IEEE subscripts for site is over $20K. There are more than IEEE journals in these books). When I have to get journals in library, it took 'long time' to search and go to the shelf to get the journal I want.
However, I won't be very impressed in the book. As I said, this book is just summary of the reference journals. Sometimes (if not all the time), I can find the articles in the book are almost 'word by word' copied from the technical journals without any further explanation. I really doubt anyone knows the "details of physics" behind. But in the industrial, most people just trial and error, very little physics behind. I would say nobody cares too much physics, it took too much time to research and it is too difficult to keep up with new technilogies.
Rating: 5
Summary: THE best set of technical references in this area
Comment: In my 25 years of semiconductor process development I have never come across such a complete and in-depth collection of device and process knowledge in a single place. Years ago we needed to spend many hours with the journals to extract the requisite information to supplement our laboratory efforts. These volumes synthesize the basics with the most modern techniques now employed in advanced technologies. In addition, many subtle processing difficulties are addressed as well which will be much appreciated by the researcher. Through the years I have purchased in excess of 100 text references and none comes as close to these in the total knowledge contained within. These volumes are intended for the researchers and engineers working in this field yet they are so very well written and easy to comprehend that any one with such an interest in this field can understand them. Study these volumes completely.
Rating: 5
Summary: Silicon Processing for the VLSI Era
Comment: This book provides an outstanding presentation of Silicon processing technology that is technically current, rich in detail, and most importantly, factually correct. The new edition of this book appears to have been completely rewritten, and covers every important area of Silicon processing in a comprehensive manner. I especially enjoyed that fact that in each chapter of the book the basic principles underlying a technology are explained first, and these explanations are then integrated into descriptions of the relevant technology (i.e. PVD, CVD, CMP etc.).
The two Lithography sections are beautifully done, and contain lucid explanations of concepts that I have not seen anywhere else.
For anyone who is seriously interested in semiconductor manufacturing, this book is a "must have". No other volume even comes close to being this comprehensive.
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Title: Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology by Stanley Wolf, Lattice Press ISBN: 096167217X Publisher: Lattice Press Pub. Date: May, 2002 List Price(USD): $229.95 |
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Title: Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFET by Stanley Wolf ISBN: 0961672153 Publisher: Lattice Press Pub. Date: October, 1994 List Price(USD): $159.95 |
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Title: Fundamentals of Modern VLSI Devices by Yuan Taur, Tak H. Ning ISBN: 0521559596 Publisher: Cambridge University Press Pub. Date: 13 October, 1998 List Price(USD): $55.00 |
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Title: Semiconductor Material and Device Characterization by Dieter K. Schroder ISBN: 0471241393 Publisher: Wiley-Interscience Pub. Date: 19 June, 1998 List Price(USD): $125.00 |
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Title: Semiconductor Manufacturing Technology by Michael Quirk, Julian Serda ISBN: 0130815209 Publisher: Prentice Hall Pub. Date: 15 December, 2000 List Price(USD): $127.00 |
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