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Title: An Introduction to Microelectromechanical Systems Engineering (Artech House Mems Library) by Nadim Maluf ISBN: 0-89006-581-0 Publisher: Artech House Publishers Pub. Date: 01 December, 1999 Format: Hardcover Volumes: 1 List Price(USD): $102.30 |
Average Customer Rating: 4.2 (5 reviews)
Rating: 5
Summary: Excellent introduction
Comment: Lent this book to two MEMS novices who got excited and immediately bought their own copy.
Rating: 1
Summary: Too few practical details
Comment: This book is for only someone that wants to browse through the field without actually doing anything. It contains very little information of the kind I was hoping for, like etch recipes with concentrations and temperatures. I used to have the Elwenspoeks "Silicon Micromachining". That one is much better, but someone took my copy and it is out of print...
Rating: 5
Summary: Excellent Introduction to MEMS
Comment: An excellent non-technical introduction to the subject of Micromechanical Systems (MEMS). Nadim Maluf manages to cover the most important technical and economical issues of this broad topic with outstanding clarity and brevity. The MEMS market, materials and common transducer effects are presented as well as fundamental microfabrication/ -machining techniques and device packaging aspects. Emphasis is on explaining the working principles and fabrication of diverse microsensors and microactuators by case studies of commercially available systems (Ink Jet, Pressure Sensor, Flow Sensor, Radiation Sensor, Accelerometer, Gyroscope, Gas Sensor, Microphone, Microvalve and Micromirror) and emerging devices (DNA Amplification and Analysis, RF Switch, Micromechanical Resonator and Filter, Micropump, Optical Switches and Grating Light Valve, Thermomechanical Data Storage). Great read, fantastic illustrations and a wealth of well selected references for further reading.
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Title: Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition by Marc J. Madou ISBN: 0849308267 Publisher: CRC Press Pub. Date: 13 March, 2002 List Price(USD): $99.95 |
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Title: The MEMS Handbook by M. Gad-El-Hak, Mohamed Gad-El-Hak ISBN: 0849300770 Publisher: CRC Press Pub. Date: 27 September, 2001 List Price(USD): $169.95 |
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Title: Microsystem Design by Stephen D. Senturia ISBN: 0792372468 Publisher: Kluwer Academic Publishers Pub. Date: 01 November, 2000 List Price(USD): $135.00 |
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Title: Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering by Sergey Edward Lyshevski ISBN: 0849309166 Publisher: CRC Press Pub. Date: 28 September, 2000 List Price(USD): $99.95 |
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Title: Understanding Nanotechnology by Scientific American, editors at Scientific American ISBN: 0446679569 Publisher: Warner Books Pub. Date: 01 December, 2002 List Price(USD): $12.95 |
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