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Title: Silicon Wafer Bonding Technology for Vlsi and Mems Applications (Emis Processing Series, 1) by Subramanian S. Iyer, Andre J. Auberton-Herve ISBN: 0-85296-039-5 Publisher: Inspec Pub. Date: 01 May, 2002 Format: Hardcover Volumes: 1 List Price(USD): $79.00 |
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Title: SemiConductor Wafer Bonding: Science and Technology by Q.-Y. Tong, U. Gösele ISBN: 0471574813 Publisher: Wiley-Interscience Pub. Date: 23 November, 1998 List Price(USD): $115.00 |
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Title: Modeling MEMS and NEMS by John A. Pelesko, David H. Bernstein ISBN: 1584883065 Publisher: CRC Press Pub. Date: 26 November, 2002 List Price(USD): $69.95 |
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