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Microsystem Design

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Title: Microsystem Design
by Stephen D. Senturia
ISBN: 0-7923-7246-8
Publisher: Kluwer Academic Publishers
Pub. Date: January, 2001
Format: Hardcover
Volumes: 1
List Price(USD): $135.00

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Average Customer Rating: 3 (1 review)

Customer Reviews

Rating: 3
Summary: Review on microsystem design
Comment: The book tries to cover many different topics at the same time and sometimes makes a quite messy work. However, the book has very good chapters and not so good ones. It provides a good introduction on MEMS fabrication, but a more interested reader will find difficult to fabricate MEMS with the given information. Chapters 5,6,7 and 8 are excellent, but chapters 9, 10,11 and 12 are incomplete and not easily understandable for a Electrical Engineer graduate student. Chapter 13 begins with general equations to be simplified considerably later, giving the impression to the reader that he has learned only a little about fluids. Chapter 11 is quite confusing and chapter 12 lack examples in 2D and 3D lumped models.

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