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Title: Silicon VLSI Technology: Fundamentals, Practice, and Modeling by James D. Plummer, Michael D. Deal, Peter B. Griffin ISBN: 0-13-085037-3 Publisher: Prentice Hall Pub. Date: 14 July, 2000 Format: Hardcover Volumes: 1 List Price(USD): $116.00 |
Average Customer Rating: 5 (1 review)
Rating: 5
Summary: Excellent combinations of basics & updated research
Comment: Before this book was published, Wolf & Tauber's book was the only good reference I had. Plummer's new book has a thorough review of basic principles, very well updated parts on current manufacturing equipments (Wolf's book also has extensive coverage in this respect). The best part in my opinion is oxidation & diffusion parts where the authors are one of the leaders in current research. The book not only focuses on the specific details, but also gives an integrated view of the whole CMOS fabrication process, which I enjoyed a lot.
I strongly recommend this book for students who want to learn basics of IC fabrication and also professional engineers who needs a good and well updated reference.
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Title: The Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell ISBN: 0195136055 Publisher: Oxford University Press Pub. Date: 15 February, 2001 List Price(USD): $119.00 |
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Title: Device Electronics for Integrated Circuits by Richard S. Muller, Theodore I. Kamins, Mansun Chan ISBN: 0471593982 Publisher: John Wiley & Sons Pub. Date: October, 2002 List Price(USD): $127.80 |
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Title: Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition by Marc J. Madou ISBN: 0849308267 Publisher: CRC Press Pub. Date: 13 March, 2002 List Price(USD): $99.95 |
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Title: Fundamentals of Modern VLSI Devices by Yuan Taur, Tak H. Ning ISBN: 0521559596 Publisher: Cambridge University Press Pub. Date: 13 October, 1998 List Price(USD): $55.00 |
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Title: Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition) by Richard C. Jaeger ISBN: 0201444941 Publisher: Prentice Hall Pub. Date: 17 October, 2001 List Price(USD): $44.00 |
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