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Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment

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Title: Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment
by P./ Ritter, G./ Richter, H./ European Materials Research Society Meeting (1998 Strasbourg, France) Symposium F on Techniques and Challenges for 300 Mm Silicon (1998 Str/ Wagner, H. Richter, G. Ritter, P. Wagner
ISBN: 0-08-043609-9
Publisher: Elsevier Science
Pub. Date: 01 September, 1999
Format: Hardcover
List Price(USD): $156.00
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