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1999 4th International Symposium on Plasma Process-Induced Damage

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Title: 1999 4th International Symposium on Plasma Process-Induced Damage
by Thuy Dao, M. Koyanagi, Terence Hook, IEEE Electron Devices Society, IEEE, Th&&&&
ISBN: 0-9651577-3-3
Publisher: IEEE
Pub. Date: November, 1999
Format: Paperback
Volumes: 1
List Price(USD): $122.00

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