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Introduction to Microlithography (Acs Professional Reference Book)

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Title: Introduction to Microlithography (Acs Professional Reference Book)
by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden, C. Grant Wilson
ISBN: 0-8412-2848-5
Publisher: American Chemical Society
Pub. Date: December, 1994
Format: Hardcover
Volumes: 1
List Price(USD): $85.00
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Average Customer Rating: 4 (1 review)

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Rating: 4
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Comment: This book is very fundamental. I'm the novice in semiconduct process. It's a excellent book to me

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