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Micromachined Devices and Components V: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3876)

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Title: Micromachined Devices and Components V: 20-21 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3876)
by Patrick J. French, Eric Peeters, Society of Photo-Optical Instrumentation Engineers, Solid State Technology
ISBN: 0-8194-3473-6
Publisher: Society of Photo Optical
Pub. Date: 01 August, 1999
Format: Paperback
List Price(USD): $72.00
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